Semiconductor Material and Device Characterization

Dieter K. Schroder · ISBN 9780471739067
Semiconductor Material and Device Characterization | Zookal Textbooks | Zookal Textbooks
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Publisher John Wiley & Sons Inc (US)
Author(s) Dieter K. Schroder
Edition 3
Published 11th January 2006
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This Third Edition updates a landmark text with the
latest findings

The Third Edition of the internationally lauded
Semiconductor Material and Device Characterization brings
the text fully up-to-date with the latest developments in the field
and includes new pedagogical tools to assist readers. Not only does
the Third Edition set forth all the latest measurement
techniques, but it also examines new interpretations and new
applications of existing techniques.

Semiconductor Material and Device Characterization
remains the sole text dedicated to characterization techniques for
measuring semiconductor materials and devices. Coverage includes
the full range of electrical and optical characterization methods,
including the more specialized chemical and physical techniques.
Readers familiar with the previous two editions will discover a
thoroughly revised and updated Third Edition, including:

  • Updated and revised figures and examples reflecting the most
    current data and information

  • 260 new references offering access to the latest research and
    discussions in specialized topics

  • New problems and review questions at the end of each chapter to
    test readers' understanding of the material

In addition, readers will find fully updated and revised
sections in each chapter.

Plus, two new chapters have been added:

  • Charge-Based and Probe Characterization introduces charge-based
    measurement and Kelvin probes. This chapter also examines
    probe-based measurements, including scanning capacitance, scanning
    Kelvin force, scanning spreading resistance, and ballistic electron
    emission microscopy.

  • Reliability and Failure Analysis examines failure times and
    distribution functions, and discusses electromigration, hot
    carriers, gate oxide integrity, negative bias temperature
    instability, stress-induced leakage current, and electrostatic

Written by an internationally recognized authority in the field,
Semiconductor Material and Device Characterization remains
essential reading for graduate students as well as for
professionals working in the field of semiconductor devices and

An Instructor's Manual presenting detailed solutions to all the
problems in the book is available from the Wiley editorial

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